Micro pick up array with integrated pivot mount

摘要

Systems and methods for transferring a micro device from a carrier substrate include, in an embodiment, a micro pick up array structure to allow the micro pick up array to automatically align with the carrier substrate. Deflection of the micro pick up array may be detected to control further movement of the micro pick up array.

主权项

1. A micro pick up array to pick up an array of micro devices, the micro pick up array comprising:
a substrate including a base, a pivot platform having a platform surface, and a beam, wherein the base is laterally around the pivot platform, wherein the beam is between the pivot platform and the base, wherein the beam is coupled with the pivot platform at an inner pivot and coupled with the base at an outer pivot, wherein the outer pivot is on a base edge and the inner pivot is on a pivot platform edge, wherein the base edge is orthogonal to the pivot platform edge, and wherein the beam is laterally around the pivot platform and coupled with the pivot platform at a second inner pivot and coupled with the base at a second outer pivot; and an array of electrostatic transfer heads supported by the platform surface of the pivot platform.