Polishing pad

摘要

An object of the present invention is to provide a polishing pad having high planarization property and capable of making it possible to suppress the occurrence of scratches. A polishing pad of the present invention has a polishing layer having oval cells each with a long axis inclined by 5° to 45° with respect to the direction of the thickness of the polishing layer.

主权项

1. A polishing pad, comprising a polishing layer having oval cells each with a long axis inclined by 30° to 45° with respect to the direction of the thickness of the polishing layer, at least some of the oval cells being closed so as to contain a gas,
wherein the oval cells have a ratio (L/S) of average long axis length L to average short axis length S of 1.5 to 3, and the ratio of the number of the oval cells to the number of all cells is at least 80%.