A MANUFACTURING APPARATUS USING ION-BEAM WHICH MAKES IT POSSIBLE TO MULTI-STAGE MODULATE ION-BEAM ENERGY AND A MANUFACTURING METHOD THEREWITH

摘要

The present invention provides an ion beam processing apparatus capable of multi-stage control of ion beam energy and a substrate processing method using the same. The ion beam processing apparatus includes: an ion generation unit (10) having a function of generating an ion for processing a substrate (1); a process chamber (20) in which the substrate is processed by an ion beam; a primary ion beam control unit (30) positioned between the ion generation unit (10) and the process chamber (20) and having a function of forming an ion beam having certain energy after receiving the ion from the ion generation unit (10); and a substrate holder unit (40) including a substrate holder supporting the substrate.