Formation of carbon-rich contact liner material

摘要

Conductive contact structure of a circuit structures and methods of fabrication thereof are provided. The fabrication includes, for instance, providing at least one contact opening disposed over a semiconductor substrate; forming a carbon-rich contact liner material having a set carbon content conformally within the at least one contact opening disposed over the semiconductor substrate.

主权项

1. A method comprising:
fabricating a conductive contact structure, the fabricating comprising:
providing at least one contact opening disposed over a semiconductor substrate; andcreating a conformal carbon-rich contact liner material having a set carbon content therein within the at least one contact opening disposed over the semiconductor substrate.