| 摘要 |
Disclosed is a linear motor stage attenuating repulsive force of a base plate. The linear motor stage includes: a base plate; a magnet track moving on the base plate; a mover moving on one surface of the magnet track by electromagnetic force formed between the magnet track and the mover; and a couple of first and second repulsive force compensators placed in one side and the other side of the magnet track, respectively, for attenuating repulsive force applied to the base plate by a movement of the mover, wherein the first repulsive force compensator is placed on the base plate in a movable state and has a first eddy current attenuator placed in one side of the magnet track and a first elastic member connecting the first eddy current attenuator to the base plate, and the second repulsive force compensator is placed on the base plate in a movable state and has a second eddy current attenuator placed in the other side of the magnet track and a second elastic member connecting the second eddy current attenuator to the base plate. |
