THIN FILM FABRICATING APPARATUS AND MANUFACTURING METHOD OF ORGARNIC LIGHT EMITTING DEVICE USING THE SAME

摘要

An apparatus for forming a thin film comprises: an electrode container accommodating a material for forming a thin film; a plurality of pin electrodes arranged in the electrode container; a plurality of ring electrodes placed in an area corresponding to each of the pin electrodes; and a substrate holding unit arranged to face the pin electrodes and the ring electrodes to hold a substrate for forming the thin film. The purpose of the present invention is to provide the apparatus for forming a thin film, which can be applied to mass-production.