| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for inspecting a deposition mask that allows for accurate inspection of whether or not the shape pattern of an opening formed in a resin mask is normal.SOLUTION: An method for inspecting whether or not the shape pattern of an opening 25 formed in a resin mask 20 of a deposition mask 100 is normal, the deposition mask being obtained by laminating a metal mask 10 having a slit 15 formed therein and the resin mask having the opening, corresponding to the pattern prepared by deposition, formed at a position overlapping the slit. The method comprises forming, on a surface of the resin mask 20 on a side that does not contact with the metal mask 10, a color material layer 40 having a light transmittance of 40% or less at a wavelength of 550 nm, irradiating the deposition mask having the color material layer 40 formed thereon with visible light, inspecting the opening 25 formed in the resin mask 20, and removing the color material layer 40 after the inspection. Thus, the above object is achieved.SELECTED DRAWING: Figure 1 |
