ROTATION VELOCITY SENSOR AND METHOD FOR SENSING ROTATION VELOCITY

摘要

A rotation velocity sensor includes a driving unit, a proof mass, a rotation sensing element, a compensating unit, and a rotation sensing unit. The driving unit generates a vibration driving signal and a reference signal. The proof mass is driven by the vibration driving signal to vibrate in a first direction. The rotation sensing element senses a vibration of the proof mass to generate a charge signal which corresponds to a portion of the vibration of the proof mass in a second direction orthogonal to the first direction. The compensating unit generates a compensation signal according to the reference signal. The rotation sensing unit converts the charge signal to a voltage signal or a current signal, and compensates the voltage signal or the current signal according to the compensation signal to cancel a noise in the second direction.

主权项

1. A rotation velocity sensor, comprising:
a driving unit, configured to operably generate a vibration driving signal in a predetermined frequency, and generate a reference signal in a same phase of the vibration driving signal; a proof mass, configured to be operably driven by the vibration driving signal to vibrate in a first direction; a rotation sensing element, configured to operably sense a vibration of the proof mass to generate a charge signal which corresponds to a portion of the vibration of the proof mass in a second direction orthogonal to the first direction; a compensating unit, configured to operably generate a compensation signal according to the reference signal; and a rotation sensing unit, configured to operably convert the charge signal to a voltage signal or a current signal, and compensate the voltage signal or the current signal according to the compensation signal to cancel a noise in the second direction so as to obtain a compensated rotation sensing signal.