SEMICONDUCTOR ELEMENT AND SEMICONDUCTOR ELEMENT MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor element and a semiconductor element manufacturing method, which can curb time degradation.SOLUTION: A semiconductor element 1 is manufactured by a manufacturing method which comprises: a process of forming on a semiconductor laminate 22, a first insulation film 23 composed of a silicon oxide; a process of forming on the first insulation film 23, a second insulation film 24 composed of a silicon nitride; a process of forming a heater 25 on the second insulation film 24; and a process of forming on the heater 25, a third insulation film 26 composed of a silicon nitride.SELECTED DRAWING: Figure 2