FLEXIBLE CATHODOLUMINESCENCE DETECTION SYSTEM AND MICROSCOPE EMPLOYING SUCH SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a cathodoluminescence detection system the maintenance of which can be performed simply and inexpensively.SOLUTION: A cathodoluminescence detection system 110 includes: a collecting optic 112 arranged in a vacuum chamber and collecting light radiation 108 coming from a sample 106 radiated by a charged particle beam 104 and sending the radiation onto an analysis means 118; and light radiation adjustment means placed downstream of the collecting optic 112 and designed to adjust the light radiation 108 at an input unit of the analysis means 118. In the cathodoluminescence detection system, all or part of the light radiation adjustment means is placed in an environment where the pressure is higher than the pressure in the vacuum chamber.SELECTED DRAWING: Figure 1