CRYSTAL OBSERVATION SYSTEM AND CRYSTAL OBSERVATION METHOD

摘要

PROBLEM TO BE SOLVED: To perform, accurately and in a short period of time, both of creation of an image showing forms of a crystal grain and crystal grain boundary and measurement of a crystal orientation, in the same observation area of a sample.SOLUTION: A sample S is disposed so that its observation surface is horizontal. The direction of a focused ion beam irradiation device 100's axis is made to be vertical. Furthermore, the focused ion beam irradiation device 100 and an electron beam irradiation device 200 are disposed so that the angle between the axis 210 of the electron beam irradiation device 200 and the axis 110 of the focused ion beam irradiation device 100 is equal to or larger than 60° and equal to or smaller than 80°. An image (SIM image) showing forms of a crystal grain and crystal grain boundary in an observation area of the sample S is created by an electron detector 300. An electron beam backscattering diffraction pattern of the sample S is created by a CCD camera 400.SELECTED DRAWING: Figure 1