INTEGRATED RESONATOR WITH A MASS BIAS

摘要

An integrated resonator apparatus includes a piezoelectric resonator and an acoustic Bragg reflector formed adjacent the piezoelectric resonator. The integrated resonator apparatus also includes a mass bias formed over the Bragg reflector on a side of the piezoelectric resonator opposite the piezoelectric resonator.

主权项

1. A method of forming a piezoelectric resonator with a Bragg reflector, comprising:
depositing alternating dielectric layers of lower and higher acoustic impedance materials over a substrate; depositing a first resonator electrode over the alternating dielectric layers; depositing a piezoelectric layer over the first resonator electrode; depositing a second resonator electrode over the piezoelectric layer; depositing a mass bias over the resonators; and encapsulating the mass bias, first and second electrodes, piezoelectric layer, and alternating dielectric layers with a plastic.