发明名称 |
METHOD OF GENERATING WRITE DATA, MULTI CHARGED PARTICLE BEAM WRITING APPARATUS, AND PATTERN INSPECTION APPARATUS |
摘要 |
In one embodiment, a method of generating write data generates write data for a multi charged particle beam writing apparatus. The method includes dividing a polygonal figure included in design data into a plurality of figure segments including trapezoids each having a pair of parallel opposite sides extending in a first direction, the trapezoids being connected in a second direction orthogonal to the first direction such that adjacent trapezoids share the side extending in the first direction as a common side, and generates the write data including position information of a common vertex of a first trapezoid and a second trapezoid next to the first trapezoid expressed by a displacement in the first and second directions from a position of a common vertex of the second trapezoid and a third trapezoid next to the second trapezoid. |
申请公布号 |
US2016103945(A1) |
申请公布日期 |
2016.04.14 |
申请号 |
US201514794060 |
申请日期 |
2015.07.08 |
申请人 |
NuFlare Technology, Inc. |
发明人 |
YASUI Kenichi;HARA Shigehiro |
分类号 |
G06F17/50;H01J37/302;H01J37/26;H01J37/317 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
1. A method of generating write data for a multi charged particle beam writing apparatus, the method comprising:
dividing a polygonal figure included in design data into a plurality of figure segments including trapezoids each having a pair of parallel opposite sides extending in a first direction, the trapezoids being connected in a second direction orthogonal to the first direction such that adjacent trapezoids share the side extending in the first direction as a common side, and generating the write data including position information of a common vertex of a first trapezoid and a second trapezoid next to the first trapezoid expressed by a displacement in the first and second directions from a position of a common vertex of the second trapezoid and a third trapezoid next to the second trapezoid. |
地址 |
Yokohama-shi JP |