| 摘要 |
This substrate conveyor robot (1) is provided with the following: left and right arms (2La, 2Ra, 2Lb, 2Rb) that share a revolution axis (A0); an arm driving means for driving the left and right arms; and a control means for controlling the arm driving means. The pulley ratio between a revolving pulley, a first pulley, a second pulley, and a third pulley is set such that the movement trajectories of substrate retaining members (5a, 5b) are substantially linear when a first link member is rotated about the revolution axis by a first driving unit with the revolving pulley being fixed in place, causing the arms to expand and contract. Due to this configuration, it is possible for the movement trajectories of the substrate retaining members to be substantially linear when the arms expand and contract. |
