| 摘要 |
According to the present invention, a vessel to convey a precursor-containing fluid stream from a precursor material contained within the vessel comprises: an interior space defined by a top, one or more sidewalls, and a base; and at least one fluid outlet for vaporized precursor, and at least one particle barrier which defines at least one particle restricted space within the interior space wherein the particle barrier comprises at least one 3-dimensional filter. According to the present invention, a method for using an apparatus is also disclosed. |
