| 发明名称 |
METHOD OF FORMING NANOWIRES |
| 摘要 |
The present invention provides a semiconductor structure. The semiconductor structure includes: a substrate; a first nanowire on the substrate; and a second nanowire symmetrical to the first nanowire. |
| 申请公布号 |
KR20160040409(A) |
申请公布日期 |
2016.04.14 |
| 申请号 |
KR20140183000 |
申请日期 |
2014.12.18 |
| 申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
HUANG YU LIEN;LI YUNG TA;CHEN MENG KU |
| 分类号 |
H01L29/06;H01L29/423;H01L29/78 |
主分类号 |
H01L29/06 |
| 代理机构 |
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代理人 |
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