发明名称 MANUFACTURING METHOD OF SUBSTRATE GRAPHENE GROWTH AND SUBSTRATE GRAPHENE GROWTH
摘要 The present invention relates to a producing method of substrate growth graphene, and substrate growth graphene. The producing method of substrate growth graphene comprises the steps of: (1) heating a copper layer (metal layer) at about 700 to 800°C; and (2) removing oxide of a metal surface by supplying tens of sccm of hydrogen and applying hydrogen plasma before growing graphene, as an additional option.
申请公布号 KR20160040475(A) 申请公布日期 2016.04.14
申请号 KR20160000391 申请日期 2016.01.04
申请人 LEE, YOUN TEK 发明人 LEE, YOUN TEK
分类号 C01B31/04 主分类号 C01B31/04
代理机构 代理人
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