| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid control device capable of improving drive efficiency compared to conventional ones, or capable of reducing the size of the device compared to the conventional ones, and provide a pump.SOLUTION: A pump 1 includes: a vibration plate 15 having a center part 21, a frame part 22 and connection parts 23-26; a piezoelectric element 16 laminated on the center part 21 and bendingly vibrated in a concentric circular manner from the center part 21 to the connection parts 23-26; and an opposite plate 13 laminated on the frame part 22 and opposite to the connection parts 23-26 at intervals. The vibration plate 15 has a resonance mode in which an antinode of vibration occurs in each of the center part 21 and the connection parts 23-26. The opposite plate 13 has a plurality of flow passage holes 39-43 through which fluid flows, at positions opposite to the connection parts 23-26.SELECTED DRAWING: Figure 2 |
