PIEZOELECTRIC MATERIAL FILM, PIEZOELECTRIC ELEMENT, AND INK JET HEAD

摘要

PROBLEM TO BE SOLVED: To provide an ink jet head including a piezoelectric element having a piezoelectric material film which achieves excellent orientation properties and pressure resistance.SOLUTION: An ink jet head includes: a substrate 2 in which cavities for storing an ink are divided; vibration films 10 supported by the substrate 2 and dividing the cavities; and piezoelectric elements 20 which are respectively disposed on the vibration films 10 and displace the vibration film 10 to change volumetric capacity of the cavities. Each piezoelectric element 20 includes: a lower electrode 22; a piezoelectric material film 24 provided on the lower electrode 22; and an upper electrode 21 which is provided on the piezoelectric material film 24 and faces the lower electrode 22 while sandwiching the piezoelectric material film 24 therebetween. The piezoelectric material film 24 includes: a columnar structure tissue layer 75; and an amorphous tissue layer 76 which is laminated contacting with the columnar structure tissue layer 75 and made of a piezoelectric material.SELECTED DRAWING: Figure 8