| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint method and an imprint device capable of controlling an amount of a resin material held in a template.SOLUTION: There is provided an imprint method which includes: a template resin contact step of bringing a template 30 on which a pattern 31 having a predetermined shape is formed into contact with a resin 20 on a holding body 10; a template separation step of separating the template from the holding body, and making the template holding at least a part of the resin; and a template substrate approaching step of allowing the template holding at least a part of the resin to approach the substrate 40, and bringing at least a part of the resin into contact with the substrate. A contact angle θ of the surface of the template and the resin is a contact angle of the surface of the holding body and the resin, or less.SELECTED DRAWING: Figure 2 |
