| 发明名称 |
Sensor With Protective Layer |
| 摘要 |
A sensor comprises a sensor layer comprising a ceramic material; an adhesion layer comprising chromium, the adhesion layer adhered to one or more portions of a liquid facing surface of the sensor layer; and an isolator film comprising a polymer, the isolator film overlaying a liquid facing surface of the adhesion layer. The isolator film may be used to protect the sensor from corrosive and high temperature fluids, for example to protect the sensor from long term exposure to hot water between 85° C. and 100° C. |
| 申请公布号 |
US2016103033(A1) |
申请公布日期 |
2016.04.14 |
| 申请号 |
US201414890752 |
申请日期 |
2014.06.04 |
| 申请人 |
ENTEGRIS, INC. |
发明人 |
Cooke Richard A.;Gonnella George;Moon Sung In;Extrand Charles W.;Pillion John E. |
| 分类号 |
G01L19/06 |
主分类号 |
G01L19/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A sensor, comprising:
a sensor layer comprising a ceramic material; an adhesion layer comprising chromium, the adhesion layer adhered to one or more portions of a liquid facing surface of the sensor layer; and an isolator film comprising a polymer, one or more portions of the isolator film being bonded to a liquid facing surface of the adhesion layer. |
| 地址 |
Billerica MA US |
