Disclosed and claimed herein is a composition for forming a spin-on hard-mask, having a fullerene derivative and a crosslinking agent. Further disclosed is a process for forming a hard-mask.
申请公布号
WO2016058008(A2)
申请公布日期
2016.04.14
申请号
WO2015US64089
申请日期
2015.12.04
申请人
ROBINSON, ALEX PHILLIP GRAHAM;FROMMHOLD, ANDREAS;BROWN, ALLEN;LADA, TOM
发明人
ROBINSON, ALEX PHILLIP GRAHAM;FROMMHOLD, ANDREAS;BROWN, ALLEN;LADA, TOM