发明名称 THIN FILM TRANSISTOR SUBSTRATE, METHOD FOR MANUFACTURING THIN FILM TRANSISTOR SUBSTRATE, AND DISPLAY PANEL
摘要 The present invention is provided with a substrate (10), and a first thin film transistor (1) and a second thin film transistor (2), which are disposed on the substrate (10). The first thin film transistor (1) is provided with a first gate electrode (21), and a first oxide semiconductor layer (41) used as a channel, the second thin film transistor (2) is provided with a second gate electrode (22), and a second oxide semiconductor layer (42) used as a channel, and a first oxide semiconductor material constituting the first oxide semiconductor layer (41) has a mobility that is different from that of a second oxide semiconductor material constituting the second oxide semiconductor layer (42).
申请公布号 WO2016056204(A1) 申请公布日期 2016.04.14
申请号 WO2015JP04987 申请日期 2015.09.30
申请人 JOLED INC. 发明人 HAYASHI, HIROSHI
分类号 H01L21/336;G09F9/30;H01L21/363;H01L21/8234;H01L27/08;H01L27/088;H01L29/786;H01L51/50 主分类号 H01L21/336
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