| 摘要 |
The present invention makes it possible to specify, with high precision, a heat source position inside an object to be measured by improving temporal resolution. This analysis device, which specifies a heat source position inside an object to be measured, is provided with: a condition setting unit that sets a measurement point for one surface of the object to be measured; a tester that applies a stimulus signal to the object to be measured; a light source that shines a light on the measurement point of the object to be measured; a light detector that, in response to the shining of the light, detects light reflected from a prescribed measurement point on the surface of the object to be measured, and outputs a detection signal; and a data analysis unit that, on the basis of the detection signal and stimulus signal, derives the distance from the measurement point to the heat source position, and specifies the heat source position. |
