发明名称 Improving the Strength of Micro-Bump Joints
摘要 A device includes a work piece including a metal bump; and a dielectric layer having a portion directly over the metal bump. The metal bump and a surface of the portion of the dielectric layer form an interface. A metal finish is formed over and contacting the metal bump. The metal finish extends from over the dielectric layer to below the interface.
申请公布号 US2016104685(A1) 申请公布日期 2016.04.14
申请号 US201514976927 申请日期 2015.12.21
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Shen Wen-Wei;Chen Chen-Shien;Kuo Chen-Cheng;Chen Ming-Fa;Wang Rung-De
分类号 H01L23/00;H01L25/00;H01L25/065 主分类号 H01L23/00
代理机构 代理人
主权项 1. A bump structure comprising: a metal pad; a passivation layer over the metal pad, the passivation layer having an opening exposing a portion of the metal pad; and a metal bump over the metal pad, the metal bump having a lip extending laterally beneath a lowermost surface of the passivation layer, the lip anchoring the metal bump to the passivation layer.
地址 Hsin-Chu TW
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