| 摘要 |
PROBLEM TO BE SOLVED: To increase frictional force on the surface of a suction jig, by using a vibration absorption material in a cutting table of a cutting device.SOLUTION: In a cutting device, a cutting table 16 is constituted by attaching a suction jig 7 onto a base 17. At the cutting table 16, a plurality of suction holes 13 provided in a suction member 9, a plurality of through holes 14 provided in a metal plate 8 and a space 18 provided in the base 17 are interconnected. By means of a vacuum pump 21, a sealed substrate 1 or respective areas 6, corresponding a plurality of products, are sucked via the space 18, the plurality of through holes 14 and the plurality of suction holes 13 sequentially. By using a vibration absorption material in the suction member 9, vibration on the surface thereof is reduced, and frictional force on the surface of the suction jig 7 can be increased. Consequently, the holding force for holding the sealed substrate 1 or each area, corresponding to a product, can be increased.SELECTED DRAWING: Figure 3 |
