METHOD AND APPARATUS FOR DIAGNOSING STATUS OF PARTS IN REAL TIME IN PLASMA PROCESSING EQUIPMENT

摘要

Apparatus and methods for diagnosing status of a consumable part of a plasma reaction chamber, the consumable part including at least one conductive element embedded therein. The method includes the steps of: coupling the conductive element to a power supply so that a bias potential relative to the ground is applied to the conductive element; exposing the consumable part to plasma erosion until the conductive element draws a current from the plasma upon exposure of the conductive element to the plasma; measuring the current; and evaluating a degree of erosion of the consumable part due to the plasma based on the measured current.

主权项

1. A consumable part of a plasma reaction chamber, the consumable part is formed of conductive material and including a surface to be exposed to plasma, includes:
conductive elements embedded in the consumable part and electrically insulated from the consumable part by a dielectric layer; a probe circuit coupled to the conductive elements; and a power supply coupled to the probe circuit and ground to apply a bias potential to the conductive elements relative to the ground, wherein the conductive elements are operative to draw a current from the plasma upon exposure of the conductive elements to the plasma and the probe circuit is operative to measure the current.