发明名称 |
FLUORO POLYMER CONTACT LAYER TO CARBON NANOTUBE CHUCK |
摘要 |
Embodiments described herein generally relate to methods and apparatuses for manufacturing devices. An improved substrate support assembly having a fluoro polymer layer disposed at one or more interfaces between a substrate and a susceptor and method for processing a substrate utilizing the same are provided. The fluoro polymer layer disposed at one or more interfaces between the substrate and the susceptor allows the substrate to adhere firmly to the susceptor, and allows the substrate and the susceptor to withstand greater shear forces, thus minimizing movement between the substrate and the susceptor. |
申请公布号 |
WO2016057179(A1) |
申请公布日期 |
2016.04.14 |
申请号 |
WO2015US50591 |
申请日期 |
2015.09.17 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
VISSER, ROBERT JAN;JEONG, SANGMIN;DODABALAPUR, ANANTH |
分类号 |
H01L21/683 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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