| 摘要 |
The purpose of the present invention is to provide an image-forming optical system which: prevents scratches, foreign matter, defects, and the like, of an optical element from being superimposed onto an intermediate image, even if the intermediate image is formed in a position matching the optical element; and is capable of stably acquiring a clear final image, even if there is a manufacturing error in a relay optical system. This image-forming optical system is equipped with: a light source (11); an illumination optical system (12) which irradiates an article (A) to be observed with illumination light from the light source (11); an image-forming optical system (13) which condenses light from the article (A) to be observed; and an image capture element (light detector) (14) which acquires images by imaging the light condensed by the image-forming optical system (13). The image-forming optical system (13) is equipped with: a plurality of image-forming lenses (2), (3) which form a final image (I) and at least one intermediate image (II); a first phase modulation element (5) which is disposed further towards an object (O) than any of the intermediate images (II) formed by the image-forming lenses (2), (3) and imparts spatial distortion to the wavefronts of light from the object (O); and a second phase modulation element (6) which is disposed in a position sandwiching at least one of the intermediate images (II) together with the first phase modulation element (5) and which counteracts the spatial distortion imparted by the first phase modulation element (5) to the wavefronts of the light from the object (O). The image-forming optical system (13) has an optical magnification adjustment unit (81) for adjusting optical magnification with respect to the image-forming relationship between the first and second phase modulation elements. |
