发明名称 |
SEMICONDUCTOR OPTICAL INTEGRATED ELEMENT AND MANUFACTURING METHOD THEREFOR |
摘要 |
Provided is an semiconductor optical integrated element in which sequentially stacked on a substrate are at least a lower cladding layer, a waveguide core layer, and an upper cladding layer, wherein the following are provided: an embedded waveguide part having a structure in which a semiconductor cladding material is embedded near both ends of the waveguide core layer; and a mesa-type waveguide part having a waveguide structure in which a semiconductor layer which includes at least the upper cladding layer protrudes in a mesa-like shape. The thickness of the upper cladding layer in the embedded waveguide part is greater than the thickness of the upper cladding layer in the mesa-type waveguide part. |
申请公布号 |
WO2016056498(A1) |
申请公布日期 |
2016.04.14 |
申请号 |
WO2015JP78161 |
申请日期 |
2015.10.05 |
申请人 |
FURUKAWA ELECTRIC CO., LTD. |
发明人 |
KIYOTA, KAZUAKI;KIMOTO, TATSUYA;SAITO, YUSUKE |
分类号 |
G02B6/122;G02B6/12;G02B6/132;G02B6/136;G02F1/017;H01S5/026 |
主分类号 |
G02B6/122 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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