发明名称 SILICON CARBIDE DEVICE AND A METHOD FOR FORMING A SILICON CARBIDE DEVICE
摘要 A silicon carbide device includes a silicon carbide substrate, an inorganic passivation layer structure and a molding material layer. The inorganic passivation layer structure laterally covers at least partly a main surface of the silicon carbide substrate and the molding material layer is arranged adjacent to the inorganic passivation layer structure.
申请公布号 US2016104779(A1) 申请公布日期 2016.04.14
申请号 US201514974553 申请日期 2015.12.18
申请人 Infineon Technologies AG 发明人 Rupp Roland;Hecht Christian;Konrath Jens;Bergner Wolfgang;Schulze Hans-Joachim;Elpelt Rudolf
分类号 H01L29/16;H01L21/04;H01L29/06;H01L21/56;H01L23/31;H01L23/29 主分类号 H01L29/16
代理机构 代理人
主权项 1. A silicon carbide device comprising: a silicon carbide substrate, wherein the silicon carbide substrate comprises an epitaxial silicon carbide layer having a first conductivity type and a buried lateral silicon carbide edge termination region located within the epitaxial silicon carbide layer, wherein the buried lateral silicon carbide edge termination region has a second conductivity type, wherein the buried lateral silicon carbide edge termination region is covered by a silicon carbide surface layer comprising the first conductivity type; an inorganic passivation layer structure laterally covering at least partly a main surface of the silicon carbide substrate; and a molding material layer adjacent to the inorganic passivation layer structure.
地址 Neubiberg DE