发明名称 III族窒化物結晶および半導体装置の製造方法
摘要 The present invention provides a method for producing a Group III nitride crystal, capable of producing a Group III nitride crystal in a large size with few defects and high quality. The method is a method for producing a Group III nitride crystal (13), including: a seed crystal selection step of selecting plural parts of a Group III nitride crystal layer (11) as seed crystals for generation and growth of Group III nitride crystals (13); a contact step of causing the surfaces of the seed crystals to be in contact with an alkali metal melt; a crystal growth step of causing a Group III element and nitrogen to react with each other under a nitrogen-containing atmosphere in the alkali metal melt to generate and grow the Group III nitride crystals (13), wherein the seed crystals are hexagonal crystals, in the seed crystal selection step, the seed crystals are arranged so that m-planes of the respective crystals grown from the seed crystals that are adjacent to each other do not substantially coincide with each other, and in the crystal growth step, the plural Group III nitride crystals (13) grown from the plural seed crystals by the growth of the Group III nitride crystals (13) are bound.
申请公布号 JP5904421(B2) 申请公布日期 2016.04.13
申请号 JP20130553314 申请日期 2013.01.10
申请人 国立大学法人大阪大学 发明人 森 勇介;今出 完;吉村 政志;平尾 美帆子;今西 正幸
分类号 C30B29/38;C30B19/12 主分类号 C30B29/38
代理机构 代理人
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