THIN FILM FABRICATING APPARATUS AND MANUFACTURING METHOD OF ORGANIC LIGHT EMITTING DEVICE USING THE SAME

摘要

A thin film fabricating apparatus includes: an electrode bath (6) which contains a thin film-forming material (5); a plurality of needle electrodes (4) disposed in the electrode bath (6); a plurality of ring electrodes (3) disposed on the electrode bath (6) at positions corresponding to the needle electrodes (4); and a substrate stand (1) disposed opposite to the needle electrodes (4) and the ring electrodes (3), where the substrate stand holds the substrate (2), on which a thin film is to be formed.