发明名称 位置合わせ装置及びその位置合わせ装置を備える露光装置
摘要 [Problem] To provide an alignment means that maintains alignment accuracy with a bottom layer of a printed board with multiple layers for use in an electronic circuit, and which enables adjustment of the alignment of an electronic component mounted on the surface of the printed board. [Solution] An alignment device comprises a storage section (82) that stores design coordinate positions (MC) at which alignment marks (AM) should be formed on a substrate (PB), a measuring section (70) that measures the coordinate positions of the alignment marks transferred to the substrate, and a calculation section (84) that calculates target coordinate positions (TG) which are the coordinate positions of the alignment marks measured by the measuring section that are moved by a prescribed distance only to the design coordinate positions.
申请公布号 JP5903426(B2) 申请公布日期 2016.04.13
申请号 JP20130504657 申请日期 2012.03.05
申请人 株式会社オーク製作所 发明人 李 徳;中澤 朗
分类号 G03F9/00 主分类号 G03F9/00
代理机构 代理人
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