发明名称 電磁波発生素子、電磁波発生装置および電磁波発生方法
摘要 An electromagnetic radiation generating device generates electromagnetic wave pulses (LT1) from a plane surface which receives pulsed light (LP1). The electromagnetic radiation generating device includes an electromagnetic radiation generating element (10), a light irradiating unit, and a reverse bias voltage applying circuit. The electromagnetic radiation generating element (10) includes a depletion layer forming body (90) formed by stacking a p-type silicon layer (14) and an n-type silicon layer (15) in a planar pattern having a pn junction (17), an antireflection film (16) and a light receiving surface electrode formed on the light receiving surface (10A) which is one surface of the depletion layer forming body (90), the light receiving surface electrode including a plurality of parallel electrode parts (121) that are equally spaced while the distance is maintained between the parallel electrode parts (121), the distance corresponding to the wavelength of the electromagnetic wave pulses (LT1) generated from the depletion layer forming body (90) and a rear surface electrode (13) formed on the rear surface (10B) which is the opposite surface of the depletion layer forming body (90). The reverse bias voltage applying circuit applies a voltage to bring a depletion layer formed in the depletion layer forming body into a reverse biased condition through the light receiving surface electrode and the rear surface electrode (13).
申请公布号 JP5904530(B2) 申请公布日期 2016.04.13
申请号 JP20110277033 申请日期 2011.12.19
申请人 株式会社SCREENホールディングス;国立大学法人大阪大学 发明人 中西 英俊;斗内 政吉
分类号 H01S1/02 主分类号 H01S1/02
代理机构 代理人
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