| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing apparatus capable of generating cleavage/rupture up to a deep position within a workpiece as compared with a conventional technique and forming a division origin at a time of dividing the workpiece.SOLUTION: A laser processing apparatus for irradiating a workpiece with laser beams and processing the workpiece, includes: a stage onto which the workpiece is fixed; and an optical system for irradiating, from an irradiation lens, the workpiece fixed onto the stage with pulse laser beams emitted from a laser light source. The optical system includes branching means for optically branching one pulse laser beam emitted from the laser light source to pass along a plurality of branch optical paths, the branch optical paths commonly including the irradiation lens, and including a group of lenses different in composite focal length, respectively so that a plurality of pulse laser beams radiated on an irradiation target position via the branch optical paths from the irradiation lens has different focal positions. |
