发明名称 |
STABLE HIGH MOBILITY MOTFT AND FABRICATION AT LOW TEMPERATURE |
摘要 |
A method of fabricating a stable high mobility amorphous MOTFT includes a step of providing a substrate with a gate formed thereon and a gate dielectric layer positioned over the gate. A carrier transport structure is deposited by sputtering on the gate dielectric layer. The carrier transport structure includes a layer of amorphous high mobility metal oxide adjacent the gate dielectric and a relatively inert protective layer of material deposited on the layer of amorphous high mobility metal oxide both deposited without oxygen and in situ. The layer of amorphous metal oxide has a mobility above 40 cm2/Vs and a carrier concentration in a range of approximately 1018 cm−3 to approximately 5×1019 cm−3. Source/drain contacts are positioned on the protective layer and in electrical contact therewith. |
申请公布号 |
EP3005420(A2) |
申请公布日期 |
2016.04.13 |
申请号 |
EP20140801432 |
申请日期 |
2014.05.07 |
申请人 |
CBRITE INC. |
发明人 |
SHIEH, CHAN-LONG;YU, GANG;FOONG, FATT;MUSOLF, JUERGEN |
分类号 |
H01L29/786;H01L29/66 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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