发明名称 METHOD FOR PRODUCING WATER-RESISTANT ALUMINUM NITRIDE POWDER
摘要 Provided is a method for producing a water-resistant aluminum nitride powder capable of adding a good water-resistant property to an aluminum nitride powder wherein yttria exists on a particle surface. The method is for producing a water-resistant aluminum nitride powder by carrying out a treatment to a particle surface of an aluminum nitride powder, the method including the successive steps of (i) making an aluminum nitride powder contact with an acid solution wherein yttria exists at least on a particle surface of the aluminum nitride powder; and (ii) making the aluminum nitride powder contact with a phosphorous acid compound, wherein the amount of yttria which is extracted when the aluminum nitride powder is filtered, washed with water, and dried after the step (i) and is thereafter subjected to extraction with 1 mol/L hydrochloric acid is no more than 1000 mg per 100 g of the aluminum nitride powder.
申请公布号 EP2894126(A4) 申请公布日期 2016.04.13
申请号 EP20130834918 申请日期 2013.09.06
申请人 TOKUYAMA CORPORATION 发明人 TAMAGAKI, MEGUMU;KANECHIKA, YUKIHIRO
分类号 C01B21/072;H01L23/373 主分类号 C01B21/072
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