发明名称 |
MICRO PICK UP ARRAY WITH COMPLIANT CONTACT |
摘要 |
Micro pick up arrays for transferring micro devices from a carrier substrate are disclosed. In an embodiment, a micro pick up array includes a compliant contact for delivering an operating voltage from a voltage source to an array of electrostatic transfer heads. In an embodiment, the compliant contact is moveable relative to a base substrate of the micro pick up array. |
申请公布号 |
EP3003967(A1) |
申请公布日期 |
2016.04.13 |
申请号 |
EP20140734318 |
申请日期 |
2014.05.23 |
申请人 |
LUXVUE TECHNOLOGY CORPORATION |
发明人 |
BIBL, ANDREAS;GOLDA, DARIUSZ |
分类号 |
B81C99/00;B25J15/00;H01L21/67;H01L21/683;H01L21/768;H01L23/00 |
主分类号 |
B81C99/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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