发明名称 Sample holder
摘要 A sample holder according to an embodiment is a sample holder on which a sample to be observed with an electron microscope is mounted. The sample holder includes a support unit, a holder body, and a rotation mechanism. The support unit has a longitudinal direction and has a first end on which the sample can be mounted. The holder body holds the support unit at a second end on the opposite side from the first end. The rotation mechanism is provided inside the holder body and rotates the support unit with the longitudinal direction serving as an axis. A central axis of the holder body and a rotation axis of the support unit are axes in substantially same directions.
申请公布号 US9312096(B2) 申请公布日期 2016.04.12
申请号 US201414481805 申请日期 2014.09.09
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 Hanada Kazuhiro
分类号 H01J37/26;H01J37/20 主分类号 H01J37/26
代理机构 Holtz, Holtz & Volek PC 代理人 Holtz, Holtz & Volek PC
主权项 1. A sample holder on which a sample to be observed with an electron microscope is mounted, the sample holder comprising: a support unit extending in a first longitudinal direction and having a first end on which the sample can be mounted; a holder body extending in a second longitudinal direction parallel to the first longitudinal direction, wherein the holder body holds the support unit at a second end of the support unit on an opposite side from the first end and is connected directly to the support unit; and a rotation mechanism provided inside the holder body and configured to rotate the support unit with the first longitudinal direction serving as a rotation axis of the support unit, wherein a central axis of the holder body and the rotation axis of the support unit are axes in substantially same directions.
地址 Tokyo JP