AIR FLOW SENSOR FOR IMPROVING DURABILITY

摘要

The present invention relates to an air flow rate sensor for improving durability which increases durability to minimize damage. The air flow rate sensor comprises: a silicon substrate; a support film stacked on an upper portion of the silicon substrate; a sensor unit stacked on an upper portion of the support film wherein the sensor unit has a micro-heater, temperature measurement resistors arranged in both sides of the micro-heater, and a lead pattern continued from the micro-heater and the temperature measurement resistors; and a protection film stacked on an upper portion of the sensor unit. A portion of the lead pattern is arranged to be hung on upper portions of both edge portions of an opened groove of the silicon substrate.