Controller for actuating a micromechanical actuator, actuating system for actuating a micromechanical actuator, micro-mirror system and method for actuating a micromechanical actuator

摘要

A controller for actuating a micromechanical actuator, including a first signal input which is designed to receive a reference signal, a second signal input which is designed to receive a measuring signal which denotes a recorded response by the micromechanical actuator to a control signal, a first controller element which is designed to filter and/or to attenuate predefined frequency modes and/or predefined frequency components in the received reference signal and to output a filtered and/or attenuated reference signal, a second controller element which is designed to modify the received measuring signal in order to minimize the quality of the first mode of the received measuring signal and to output a modified measuring signal, a third controller element which is designed to minimize the deviation between the filtered and/or attenuated reference signal and the received measuring signal and to output a minimized reference signal, a fourth controller element which is designed to modify the bandwidth of the received measuring signal and to subtract it from the minimized reference signal, which makes up the control signal. Furthermore, a corresponding actuating system, a corresponding micro-mirror system and a corresponding method are described.

主权项

1. A controller for actuating a micromechanical actuator in a closed loop circuit, comprising:
a first signal input to receive a reference signal; a second signal input to receive a measuring signal which denotes a recorded response by the micromechanical actuator to a control signal; a first controller element to at least one of filter and attenuate at least one of predefined frequency modes and predefined frequency components in a received reference signal and to output at least one of a filtered and attenuated reference signal; a second controller element to modify a received measuring signal to minimize a quality of at least one of a first mode and further modes of the closed loop circuit and to output a modified measuring signal; a third controller element to minimize a deviation between the at least one of the filtered and attenuated reference signal and the received measuring signal and to output a minimized reference signal; and a fourth controller element to adapt the received measuring signal to adapt a bandwidth of the closed loop circuit and to add the adapted measuring signal to a sum of the minimized reference signal and a modified measuring signal, which creates a control signal.