Strain gauge pressure sensor

摘要

A pressure transducer assembly that includes a pressure-responsive diaphragm to which a sensing element is mounted and an electronic package that includes wire-bonding pads adapted be electrically connected to the sensing element by wire bonding equipment. The diaphragm and wire bonding pads are supported within the transducer so that they lie in proximity to each other and in non-intersecting planes.

主权项

1. A pressure sensor assembly comprising:
a pressure port having a base and a neck extending upwardly from the base, the neck including a sidewall; a fluid passageway formed through the base and into the neck, the base being connectable to a fluid pressure environment; a diaphragm disposed along the side wall of the neck, the diaphragm having an outer face and an inner face, the inner face exposed to the fluid passageway the sidewall of the neck having a flat outer surface that defines the outer face of the diaphragm, the inner surface of the neck machined to define a circular flat inner surface that parallels the outer face and defines the diaphragm; a sensing element responsive to diaphragm movement mounted on the outer surface of the diaphragm; an electronics package mounted adjacent the neck and including wire bonding pads to facilitate wire connection between the electronics package and the sensing element; the wire bonding pads and the diaphragm being disposed in planar alignment.