发明名称 Apparatus for acquiring information from object to be measured and aquiring method therefor
摘要 An apparatus configured to acquire information on an object to be measured by an electromagnetic wave pulse, the apparatus includes: a generating unit configured to generate the electromagnetic wave pulse with which the object to be measured is irradiated; a detecting unit configured to detect the electromagnetic wave pulse from the object to be measured; a casing including at least a part of a propagation path of the electromagnetic wave pulse leading from the generating unit to the detecting unit; and a measuring window unit configured to change a propagation distance of the electromagnetic wave pulse by moving a measuring window disposed in a part of the casing. The object to be measured is disposed on an opposite side of the propagation path of the electromagnetic wave pulse inside the casing by interposing the measuring window.
申请公布号 US9310254(B2) 申请公布日期 2016.04.12
申请号 US201414161509 申请日期 2014.01.22
申请人 Canon Kabushiki Kaisha 发明人 Itsuji Takeaki
分类号 G01J5/10;G01J3/42;G01J5/08;G01N21/03;G01N21/3586 主分类号 G01J5/10
代理机构 Canon USA Inc. IP Division 代理人 Canon USA Inc. IP Division
主权项 1. An apparatus configured to acquire information on an object to be measured by irradiating the object with an electromagnetic wave pulse, the apparatus comprising: a generating unit configured to generate the electromagnetic wave pulse with which the object is irradiated; a detecting unit configured to detect the electromagnetic wave pulse from the object; and a casing including a propagation path of the electromagnetic wave pulse leading from the generating unit to the detecting unit and a measuring window interposed between the propagation path and the object, wherein the measuring window is formed of a material that has a transmittance to a terahertz wave and is configured to suppress fluctuation of ambient atmosphere in the casing, and wherein a distance of the propagation path is changed by moving the measuring window contacted from outside of the casing by the object, in a state in which the fluctuation of the ambient atmosphere is suppressed.
地址 Tokyo JP