Scale for photoelectric encoder

摘要

A scale for a photoelectric encoder includes a scale substrate and a reflection film formed at a predetermined pitch on the scale substrate. A surface of the reflection film forms a reflection surface. A low-reflection surface is formed by etching the scale substrate between reflection films. Accordingly, a scale can be provided which is lower in cost and has favorable yield rates.

主权项

1. A scale for a photoelectric encoder comprising:
a stainless steel scale substrate; a plurality of chrome reflection films each having a thickness of 25 nm to 200 nm and located on the substrate at a predetermined pitch, the plurality of reflection films comprising a reflection surface; and a low-reflection surface between reflection films of the plurality of reflection films and formed by etching the scale substrate.