发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 An objective of the present invention is to provide a reliable semiconductor device that has a thin film transistor which has stable electrical characteristics. Another objective of the present invention is to manufacture a reliable semiconductor device at a low cost and at a high level of productivity. In the semiconductor device that has the thin film transistor, a semiconductor layer of the thin film transistor is an oxide semiconductor layer to which a metallic element is added. As the metallic element, at least one metallic element is used among iron, nickel, cobalt, copper, gold, molybdenum, tungsten, niobium, and tantalum. In addition, the oxide semiconductor layer contains indium, gallium, and zinc.
申请公布号 KR20160040163(A) 申请公布日期 2016.04.12
申请号 KR20160037913 申请日期 2016.03.29
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;SAKATA JUNICHIRO
分类号 H01L29/786;H01L21/02;H01L21/205;H01L21/28;H01L27/12;H01L29/26;H01L29/66 主分类号 H01L29/786
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