| 发明名称 | Particle beam device comprising an electrode unit | ||
| 摘要 | A particle beam device comprises a beam generator for generating a particle beam having charged particles and an electrode unit having a first electrode and a second electrode, wherein the first electrode interacts with the second electrode, in particular for guiding, shaping, aligning or correcting the particle beam. Moreover, the particle beam device comprises a low-pass filter being connected with at least one of: the first electrode and the second electrode, using an electrical connection. Additionally, the particle beam device comprises a mounting unit having an opening for the passage of the particle beam, wherein the at least one low-pass filter, the first electrode and the second electrode are arranged at the mounting unit. The electrode unit may comprise more than two electrodes, for example up to 16 electrodes. | ||
| 申请公布号 | US9312093(B1) | 申请公布日期 | 2016.04.12 |
| 申请号 | US201414321921 | 申请日期 | 2014.07.02 |
| 申请人 | Carl Zeiss Microscopy GmbH | 发明人 | Fober Joerg;Fichter Edgar;Schubert Kai;Preikszas Dirk;Hendrich Christian;Mommsen Momme;Schnell Michael;Lechner Lorenz |
| 分类号 | H01J37/26;H01J37/147 | 主分类号 | H01J37/26 |
| 代理机构 | Muirhead and Saturnelli, LLC | 代理人 | Muirhead and Saturnelli, LLC |
| 主权项 | 1. A particle beam device, comprising: at least one beam generator for generating a particle beam having charged particles; at least one electrode unit comprising a first electrode and a second electrode, wherein the first electrode interacts with the second electrode for influencing the particle beam; at least one low-pass filter being connected with at least one of the first electrode and the second electrode, using an electrical connection; and a mounting unit comprising an opening for the passage of the particle beam, wherein the at least one low-pass filter, the first electrode and the second electrode are arranged at the mounting unit. | ||
| 地址 | Jena DE | ||