High dynamic range measurement system for process monitoring

摘要

A flashlamp control system is provided with a capacitor that is statically electrically connected to the high voltage power supply, and a current sensing component is then electrically connected to the static capacitor and digital control electronics to monitor the charge current and/or the discharge current to static capacitor. A dynamically switchable capacitor electrically may also be connected to the high voltage power supply and digital control electronics for isolating the dynamically switchable capacitor from the high voltage power supply based on the monitored charge current and/or discharge current. One or more homogenizing element, comprise of an air gap, diffusing homogenizing element, imaging element, non-imaging element or light pipe homogenizing element, may be disposed in the light path proximate to the flashlamp, such as a multichannel distributor if present, to decrease the coefficient of variation of the optical signal, either temporally and spectrally, or both.

主权项

1. A high dynamic range and low noise flashlamp control system comprising:
a high voltage power supply; digital control electronics for controlling a duty cycle, frequency and pulse width of said high voltage power supply; at least one dynamically switchable capacitor electrically connected to said high voltage power supply; an isolation switch electrically connected to said at least one dynamically switchable capacitor and said digital control electronics; wherein said digital control electronics identifies an uncharged state of said dynamically switchable capacitor and sends a switch signal to said isolation switch for electrically switching said isolation switch thereby isolating said dynamically switchable capacitor during the uncharged state of said dynamically switchable capacitor; current sensing component electrically connected to said at least one dynamically switchable capacitor for monitoring at least one of a charge current and a discharge current of said at least one dynamically switchable capacitor, said current sensing component further electrically connected to said digital control electronics for providing a feedback control signal via the monitored at least one of a charge current and a discharge current for said at least one dynamically switchable capacitor; a trigger element controlled by said digital control electronics; and a flashlamp bulb electrically connected to said high voltage power supply for sourcing an optical signal.