Ink jet head and ink jet recording apparatus

摘要

According to one embodiment, there is provided an ink jet head which includes a pressure chamber which is formed in a thickness direction of a substrate, and fills ink; a vibrating plate which is provided on a first face of the pressure chamber, and includes a nozzle which communicates with the pressure chamber; a driving unit which is provided on the vibrating plate, and includes a piezoelectric substance; and a warpage reducing layer which is provided on a second face which is opposite to the first face of the pressure chamber, and reduces warpage of the substrate.

主权项

1. An ink jet head comprising:
a substrate including a first surface and a second surface opposite the first surface; a pressure chamber which is formed in a thickness direction of the substrate to penetrate the substrate, and in which ink is filled; a vibrating plate which is provided on the first surface, and includes a nozzle which communicates with the pressure chamber; a driver unit which is provided on the vibrating plate, and includes a piezoelectric substance; a warpage reducing layer which is made of a thermal oxidation film formed on the second surface to reduce warpage of the substrate; and an ink flow path which fluidly communicates with the pressure chamber, wherein materials of the warpage reducing layer and the vibrating plate are the same, and film thickness of the warpage reducing layer and the vibrating plate are the same.