| 摘要 |
[Problem] To provide a method and device for measuring carrier lifetime with which the lifetime of a carrier in a sample such as a semiconductor can be measured. [Solution] Continuous light emitted by an emission laser is modulated by a modulator on the excitation side, and excitation light (14), the intensity of which changes to a rectangular pulse, is generated and fed to a semiconductor material. A carrier in a semiconductor is excited, and luminescence (24) generated by recombination is modulated by a modulator on the light-receiving side, and an attenuated ray (26) generated after an excitation period is separated from the light generated in the excitation period. This attenuated ray (26) includes information on the lifetime of the carrier in a sample. Since the attenuated ray (26) is fine light obtained in a very short time, multiple attenuated light rays (26) accumulate and are detected within the exposure time of a CCD element. The carrier lifetime can be identified by the intensity of this detected light. |
